TABLE 12.1
Wide Bandgap Material, Fabrication Method, Properties, and Their Applications in Bioelectronics
Wide
bandgap
materials
Fabrication
methods
Fabrication technique
Properties
Applications
II-VI
bottom-up [ 16].
• growth combining with transferring
flexible substrates
• piezoelectric polarization
• biodegradability
• direct bandgap
• sensitive mechanical sensing
• wearable ultraviolet (UV)
photosensor
III-nitride
bottom-up [ 28].
top-down [ 30].
• growth combining with transferring
flexible substrates
• micro/nano- machining combined
with transfer printing
• high electron mobility
• chemical inertness
• high optical transmittance
• sensitive mechanical sensing
• long-term energy scavenger
• optogenetics LED
SiC
bottom-up [ 29].
top-down [ 31].
• growth combining with transferring
flexible substrates
• micro/nano- machining combined
with transfer printing
• chemical inertness
• biocompatibility
• thermal and mechanical robustness
• long-lived recording and sensing
• sensitive mechanical sensing
• radio frequency wireless
communication devices
194
Bioelectronics